The Ulvac Technology MILA 3000 Rapid Thermal Annealing (RTA) vacuum furnace is a programmable tabletop furnace for high temperature materials testing and analysis. It can heat samples to 1200°C in ...
Various thermal processing equipment is available for oxidation, chemical vapor deposition, and annealing. The Protemp furnaces are horizontal quartz tubes that can process many wafers at once in many ...
Controlling furnace temperatures is critical for achieving uniform heat treatment and meeting production standards.
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